The National Nanofabrication Centre (NNfC) at the Centre for Nano Science and Engineering (CeNSE) is a CMOS/MEMS/NEMS- capable research facility located at the Indian Institute of Science, Bengaluru (India). This Centre houses state-of-the-art research equipment for both fabrication and in-line characterization of the devices.
The Nanofab is capable of routinely processing 100 mm (4-inch) silicon wafers with a handful of tools that can process larger, 150 mm (6-inch) substrates.