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Lithography
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- ICP-RIE
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Inline Characterisation
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A list of all NNFC equipments as per their FOM desgination and their respecitive tool owners is given below.

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Centre for Nano Science and Engineering

Indian Institute of Science,

Bangalore - 560 012

Phone: +91-80-2293-3276/3291

(c) National Nanofabrication Centre, CeNSE, IISc, 2018.