Dektak-XT

Equipment Category:

Inline Characterisation

The Dektak XT surface profiler is an advanced thin and thick film step height, roughness and 2D stress measurement tool.

Profiling surface topography and waviness.
Measures roughness in the nanometre range.
The system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option.
Stress measurement of thin film on full inch wafer (2”, 3”, 4”, 6”, and 8”).

Measurement Technique: Stylus Profilometry Contact Measurement
Measurement Capability: Two Dimensional Surface Profile Measurements
Stylus Sensor: Low Inertia Sensor
Stylus Force: 1mg - 15mg LIS 3 Sensor
Low Force Option: 0.03-1mg
Stylus Options: 2µ and 12.5µ
Scan Length: 50mm for 2” and 200mm for 8” with Scan Stitching Capability
Data Points Per Scan: 120,000 maximum
Maximum Step Height that can be measured: 800µ
Minimum Step Height that can be measured: 16nm

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Weekday: Every Monday

Practice slots only on Tuesday

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