Dektak-XT

Equipment Category: 

The Dektak XT surface profiler is an advanced thin and thick film step height, roughness and 2D stress measurement tool.

  • Profiling surface topography and waviness.
  • Measures roughness in the nanometre range.
  • The system can produce three-dimensional measurements and analyses when equipped with the 3D Mapping Option.
  • Stress measurement of thin film on full inch wafer (2”, 3”, 4”, 6”, and 8”).
  • Measurement Technique: Stylus Profilometry Contact Measurement
  • Measurement Capability: Two Dimensional Surface Profile Measurements
  • Stylus Sensor: Low Inertia Sensor
  • Stylus Force: 1mg - 15mg LIS 3 Sensor
  • Low Force Option: 0.03-1mg 
  • Stylus Options: 2µ and 12.5µ
  • Scan Length: 50mm for 2” and 200mm for 8” with Scan Stitching Capability
  • Data Points Per Scan: 120,000 maximum
  • Maximum Step Height that can be measured: 800µ
  • Minimum Step Height that can be measured: 16nm
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Weekday: Every Monday

Practice slots only on Tuesday

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