Equipment Category: 

Ellipsometer measures a change in polarization as light reflects or transmits from a material structure. The polarization change is represented as an amplitude ratio, Ψ, and the phase difference, Δ. The measured response depends on optical properties and thickness of individual materials. Thus, Ellipsometer is primarily used to determine film thickness and optical constants. However, it is also applied to characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response.

Standard models available for the following materials

1. SiO2

2. Si3N4 (Low & high stress)

3. PolySi

4. PolyGe

5. LTO

6. a-Si

7. Al2O3

8. TiO2

9. WO3

10. CeO2

11. Gd2O3

12. MgO

13. ITO

14. HfO2

15. ZnO

Spectral Range: 245-1000nm

Source: Deuterium and Quartz Tungsten Halogen Lamp

Receiver: Single Receiver Unit

Sample Tilt Alignment: Manual

Focusing Option: Available

Camera: High Resolution with 1X-6.5X Variable Zoom Lens

Transparent films up to 10um can be measured.

Measurement of thin film on full 12 inch wafer.

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Weekday: Every Monday

Practice slots only on Tuesday

Timings: Morning 10 AM to 12 PM.

Users must fill in the below Cleanroom Equipment Training Form for online training form in order to get trained on Ellipsometer and the Users will receive a conformation mail regarding the Date and Time of the Training conducted on the earliest possible Day from the Date User has applied for Training.

Cleanroom Equipment Training Form


Rules of Woollam Ellipsometer:

1. If you are measuring depositions on glass substrates, please note that multiple layers cannot be measured after the complete deposition. Each layer has to be measured separately and it is preferred that a sample deposition be made on Silicon and that is measured in lieu of the deposition on glass.

2. Metal depositions above 30 nm cannot be measured.

3. Please check with the concerned facility technologist for the availability of model files if novel materials are to be measured.






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