E-beam evaporator (TECPORT)

Electron-beam evaporation, uses a focused beam of electrons to heat the metal for deposition. A controlled deposition of thin-films is achieved. Both dielectrics and metals can be deposited using solid sources. The material is kept in a water-cooled crucible and exposed to the electron beam, causing it to vaporize and condense on the wafers / samples. Planetary substrate rotation provides uniform deposition. Radiant heaters are provided for substrate heating. Option for Ion Assisted deposition, Co-deposition and Ion Etching is also available.

Tool Safety Level: 

•      E-Beam evaporation is sourced from Tecport.

•       There are two electron guns and an Ion gun.

•      EB guns has two hearths. Hearth associated with EB gun-1 has four 25 cc pockets and the one associated with EB gun-2 has six 15 cc pockets.

•       One 4 pocket hearth and one 6 pocket hearth.

•       Pop-Top source

•       Max Power 10kW

•       Accelerating Voltage 4-8 kV

•       Beam deflection 270deg

•       Emission Current 0-1.5A

•       Programmable sweep controller.

•       Temescal Crucible indexer.

•       Substrate holder {6, 4, 3, 2 inch diameter}.

•       Planetary rotation with four holders.

•       Inficon IC6 deposition controller.

•       Ultimate Pressure ~2E-7 Torr.

•       Process Control using Symphony software.

•       Deposition rates from 1 Å/s to 199 Å/s.

•      Ion-assisted deposition is also possible. 

You are not authorized to access this content.

The training will be scheduled on every second; Monday and Tuesday of every month (Timing between 10 AM to 1 PM).

Before starting of the training you should thoroughly go through the training document which is attached below.

The user should attend all the two sessions after which they are requested to book slots during office hours for practice until they are confident on handling the tool independently (At least 4 slots). The practice session should be completed within 60 days after the training session, if not the user should re-register and get trained again.

After the practice sessions users will be certified as an independent user.

Once the user becomes an independent they are supposed to book and use the tool only during non-office hours.

Independent user ship will be revoked, if one does not use the tool continuously for 3 months and if the user found mishandling the tool. These users will have to be re-certified.

Drop a mail to the tool owner Shreyas Bhat (shreyasbhat@iisc.ac.in) and cc the manager Raghupathy N (raghupathyn@iisc.ac.in), mentioning the batch which the user want to join for the training.

Only four users will be trained at a time and it’s on first come first serve basis (interested users please e-mail the tool owner and keep the manager in Cc).

Cleanroom Equipment Training Form