In micro and nanofabrication of devices, comtamination play a key role in the device performance. Since NNfC facilities various research activity that requires a different level of contamination tolerances, it is essential for the facility to maintain an acceptable level of contamination in respective tools. At NNfC a strict contamination protocol is followed to help the users to achieve desired device performance.
Tools are classified under four level of contamination and movement between the levels is restricted. A details presentation on the contamination protocol can be found here.