Thermal Evaporator is inside the Glove Box.
• 4” diameter sample Holder.
• Coating uniformity 10%.
• Substrate planetary rotation is available for better film uniformity.
Substrate heater not available
|
Make |
MBraun Thermal Evaporator System [glovebox integrated] |
|
Cathodes |
Two terminal Electrodes |
|
Power Source |
Resistive Heating, LT Source |
|
Ultimate Pressure |
3X10-6 mbar |
|
Materials |
Au, Al, Ag, In, Ca, Bi, Zn, Pb, MoO3 etc; |
|
Substrate Holder |
Tungsten boat, Tungsten helical coils, Tungsten baskets, Molybdinum boats are available. |
Operating Parameters:
|
Power |
1-50% of LT source |
|
Substrate Rotation |
Possible |
|
Substrate to target distance |
21cm |
|
Deposition time |
Depends upon the thickness and power |
System connected to Turbo molecular pump >230l/s for high vacuum
