Four Point Probe

Equipment Category: 
Inline Characterisation

A four point probe is a simple apparatus for measuring the resistivity of semiconductor samples. By passing a current through two outer probes and measuring the voltage through the inner probes allows the measurement of the substrate resistivity

 Semiconductor and Conductor Materials

  • Wafer or square wafer maximum size: 8-in wafer or 6 x 6 inches square wafers
  • Sheet resistance range: from 0.001 Ω/Square to > 800K Ω/Square
  • Mapping positions can be close to wafer edge; up to 3mm edge exclusion
  • Custom site mapping (number of sites needs to be more than 2)
  • Measurement units: Ω/Square, Ohm-cm, V/I, t(μ), t(Å)
  • Accuracy of the electronic: < 0.1% (precision resister)
  • Measurement repeatability: <0.2% (typ)
  • Input impedance: >107 Ohms throughout the measurement range
  • Maximum measurement time for a 49-site wafer mapping (test diameter at 194 mm, two configuration method) is less than 1.5 minutes
  • Compliance voltage ± 125 Volts in current range from 0.25μA to 250mA
  • Current resolution: 16-Bit A/D
  • Measurement calibration NIST/VLSI traceable
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(c) National Nanofabrication Centre, CeNSE, IISc, 2018.