Suss MicroTec Mask aligner is a "SEMI-AUTOMATIC" Contact Photo-Lithographic Alignment and Exposure Tool with the above mentioned Specifications. It also has the Capability of Front to Back Alignment of Patterns. Recipes for different Exposure types and Contact Modes can be Pre-Written and is very User friendly.
Wafer/substrate parameter: 1” upto 4” * Mask parameter: Standard 2” x 2” to 5” to 5” (exposable are 1” upto 4”)
Alignment accuracy: 0.5µm for top side and 5µm for bottom side
Separation and proximity adjustment: 50 µm between mask and substrate
Contact force between mask & substrate: 0.2 Bar to 2 Bar
Contact modes: Soft, Hard, Low vacuum, Vacuum, Gap exposure
Printing resolution: Less than 1µm in vacuum contact
Training Charges - Rs. 5,000 on completion of the training - first 2 slots booked would be free of charge
Click below link for online training form. Users will receive a conformation mail regarding the Date and Time of the Training conducted on the earliest possible Day from the Date User has applied for Training
https://docs.google.com/forms/d/e/1FAIpQLSc_0W9aDPMzp9gmJ0K9I4MBxdPmu6ry...
Cleanroom Equipment Training Form
Training Rules:
Before attending the Training Schedule you should clearly read the Operating Instructions and the details mentioned in website regarding the Lithography Section.
After attending the Scheduled Training Slot you should book "PRACTICE SLOTS" in Office Hours by yourself to get hands on experience on the Tool. The "PRACTICE SLOTS" are carried out in the presence of the "TOOL OWNER".
You can book a maximum of three "PRACTICE SLOTS" to get Hands on experience on the tool, if you are not confident with the Tool even after three "PRACTICE SLOTS" you should attend the Training Schedule again and repeat the previous step.
If you cannot find any Slots for Practice Session in Office Hours contact Tool Owner.
During the Practice Slots (under the observation of Tool Owner) if you are confident with the usage of Tool, you will get the Authorization for using the Tool Independently.
Once you are Authorized User try to use the Tool in Non-Office Hours.
Training Schedule:
Day: 2nd and 4th Thursday of every month
Timings: Morning 10 AM to 1 PM.