Spin Coater

Spin Coater is used to distribute Photoresist in a unifrom layer by spinning a Substrate. This spin processor is used for spin coat Polymers.

1. Make: HOLMARC Model: HO-TH-05

2. Chuck diameters - 10mm, 22mm, and 35mm

3. Holding capacity: 4” wafer

     

    Actuator                                :         Brushless DC motor

    Spinning speed                      :          60 - 8000rpm

    Power input                           :           230V, 50Hz

    Read out                                 :           20 x 4 line LCD

    Spin chamber                        :           Nylon

    Acceleration                           :           5 - 2000 rpm / sec

    Spinning Speed Accuracy    :           < 5%

    Programmable parameter   :           Speed, Acceleration, Dwell time and No. of steps

    Maximum no of steps            :           9

    Program memory                  :           9 programs (non – volatile)

    Dimension                              :           400mm Depth x 275mm W x 500mm H

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